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PFCs in the semiconductor industry: a primer

Dates

Publication Year
2000
Publication Date
2000-07

Citation

Joe Van Gompel, PFCs in the semiconductor industry: a primer: Semiconductor International [Semicond Int], vol. 23, no. 8, pp. 321-322, 324, 326+, Jul 2000.

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csa_8527.xml 1.72 KB

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This metadata record is the intellectual property of CSA/ProQuest, and was licensed for use under a contract with the USGS to support scientific research and understanding. As such, this copyrighted material should not be electronically reproduced or shared outside of ScienceBase.

Additional Information

Identifiers

Type Scheme Key
ID CSA 8527
ISSN CSA 0163-3767
Accession Number CSA 0494064

Citation Extension

citationTypeJournal Article
journalSemiconductor International [Semicond Int], vol. 23, no. 8, pp. 321-322, 324, 326+, Jul 2000
languageEnglish

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